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Beam Current Density as a function of Beam Energy
Beam Current Density as a function of Plasma Pressure
As the gas
flow through the source is reduced the plasma pressure falls along with
the pressure in the chamber. As chamber pressure is easily measured,
this is the parameter plotted. Gas flow can be calculated using the
known pumping speed. e.g. 8x10-4 Torr is
equivalent to a gas flow of 13sccm. As the plasma pressure reduces the
ionisation efficiency increases and the extracted ion current rises.
Beam Current Density as a function of Magnetron Power
From the graph
below it can be seen that extracted ion current is approximately linear
with applied microwave power.
Beam Current Density as a function of Anode and Extractor Voltages
current density was measured as a function of Anode (screen grid) and
extraction grid voltages.
Beam Current Density as a function of Extractor
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